Estimating the resolution of nanopositioning systems from frequency domain data

Title: Estimating the resolution of nanopositioning systems from frequency domain data
Creator: Fleming, Andrew J.
Relation: 2012 IEEE International Conference on Robotics and Automation. Proceedings of the 2012 IEEE International Conference on Robotics and Automation (Saint Paul, MN 14-18 May, 2012) p. 4786-4791
Relation: http://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=6224850
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: conference paper
Date: 2012
Description: Mechanical and electrical noise in nanopositioning systems is unavoidable and dictates the maximum positioning resolution. The proper specification of resolution is critical for defining the smallest possible dimensions in a manufacturing processes or the smallest measurable features in an imaging application. This article defines a standard for the reporting of resolution and demonstrates how this parameter can be measured and predicted from frequency domain data.
Subject: approximation methods; bandwidth; image resolution; nanopositioning; noise; sensor phenomena and characterization
Identifier: http://hdl.handle.net/1959.13/1063045
Identifier: uon:17195
Identifier: ISBN:9781467314053
Language: eng
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